H2SENSE has built a perfect design and processing test conditions for thin-film sensor chips. At present, there are nearly 300m2 purification workshop (including photolithography area), and the main process equipment includes lithography machine, ion beam deposition (IBD), optical coating machine, PECVD, high vacuum atmosphere annealing furnace, HYBOND golden wire bonding machine, automatic standard gas proportioning transportation system, transformer oil chromatograph and six-and-a-half bit multifunctional digital meter, with a total of nearly 40 sets.
